Electron and Scanning Probe Microscopy
JEOL 2010F Transmission Electron Microscope (TEM)
Dr. Ji-Ping Zhou, Facility Manager
Texas Materials Institute
ENS 31N
Mail Code C2201
Phone (512) 232-1884
Cell (512) 560-9813
FAX (512) 475-8482
jpzhou@ccwf.cc.utexas.edu
Field Emission Gun (FEG)
Ultra high-Resolution Observation System
Fast Operating for network (NT) and Imaging System
Scanning Image Devices to be operated as STEM from TEM
Electron Biprism for holography
Several atom level probes connected to Oxford INCA Energy Dispersive Spectrometer (EDS) and Gatan 2D Digital-Parallel Electron Energy Loss Spectrometer (DigiPEELS)
Specimen Preparation Facilities:
Fishione1010 Ion Miller
Fishione150 Dimpling Grinder
Fishione150 Plasma Cleaner
Fishione 150 Ultrasonic Disk Cutter
FEI Strata™ DB235 SEM/FIB
Mike Tiner
4.116 NST
1 University Station A5500
Austin, TX 78712
mike.tiner@mail.utexas.edu
(512) 232-3695
The FEI Strata™ DB235 is a dual beam SEM/FIB system combing a scanning electron microscope (SEM) with thermal emission tip for high resolution imaging and a focused ion beam (FIB) with gallium metal ion beam source for nanoscale cutting. The system is capable of:
·High Resolution SEM image with resolution ~3 nm (only to be used in conjunction with milling or other applications)
·Nanoscale cutting of structures using focused ion beam while simultaneously monitoring the progress using SEM.
·gas injection system for metal deposition (electron or ion beam induced deposition)
·TEM sample preparation
FEI TECNAI G2 F20 X-TWIN
Dr. Xiaoxia Gao, Facility Manager
Texas Materials Institute
MER 1.608J (Office)
MER 1.824 (Facility)
Mail Code R9900
Phone (512) 471-0233 (Office)
Phone (512) 471-1566 (Facility)
FAX (512) 475-8482
kathygao@mail.utexas.edu
FEI TECNAI G2 F20 X-TWIN Transmission Electron Microscope (TEM) is an analytical system with excellent high-resolution imaging and atomic resolution microanalysis capabilities. The system is optimized for high spatial resolution analysis and has an EDS solid angle of 0.3 steradian.
Unique, optimized user interface
Excellent fine-probe performance
Applications software support
Advanced Electron Optics design
Rapid mode switching
Rapid acceleration voltage switching
LEO 1530 scanning electron microscope
Dr. Yangming Sun , Facility Manager
Texas Materials Institute
NST 2.110, WEL 3.218
Mail Code A5300
Austin, TX 78712
Phone (512) 471-7592 or 471-5235
FAX (512) 471-9495
yangming@mail.utexas.edu
Main features include: GEMINI field emission column with a thermal field emitter; superb resolution and image quality at low operating voltage- 3nm at 1 KV; wide operating voltage range 200V to 30 KV; high probe current and stability for fast X-ray analysis; in-lens annular detector for bright, clear surface-specific image; EDS system for elemental analysis and mapping; all operations are computerized; fast multi-specimen loading system.
Digital Instruments Dimension 3100 with Nanoscope IV controller
Dr. William M. Lackowski
4.116 NST
1 University Station A5500
Austin, TX 78712
Lackowski@mail.utexas.edu
(512) 232-3694
The Dimension 3100 scanning probe microscope utilizes standard and advanced SPM imaging modes to measure surface characteristics for semiconductor wafers, lithography masks, magnetic media, CDs/DVDs, biomaterials, optics, and other samples up to 200mm in diameter. Precise laser tracking and the ability to change scanning techniques without tools guarantee flexibility and ease of use. The system's NanoScope 3D controller can scan from the maximum scan size to a few nanometers with full 16-bit resolution on all scan waveforms and on each axis. Available scanning techniques: Contact mode, Tapping mode, Non-contact mode, Phaseimaging, Lateral force microscopy, Magnetic force microscopy, Electric force microscopy, Surface potential microscopy, Tunneling atomic force microscopy, FastScan Imaging, Nanomanipulation (NANOMAN).
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