Surface Analysis Facility

Dr. Yangming Sun , Facility Manager
Texas Materials Institute
NST 2.110
WEL 3.218
Mail Code A5300
Austin, TX 78712
Phone (512) 471-7592 or 471-5235
FAX (512) 471-9495
yangming@mail.utexas.edu

PHI 5700 x-ray photoelectron spectroscopy (XPS) system equipped with dual Mg X-ray source and monochromated Al X-ray source; depth profile and angle resolved capabilities.

PHI 7200 time-of-flight secondary ion mass spectroscopy (ToFSIMS) system equipped with a Cs+ ion gun for mass spectroscopy and depth profiling.

PHI 590 scanning auger microprobe (SAM) with depth profile and mapping capabilities.

Scanning probe microscope (CP Research, Thermomicroscopes) equipped with contact, non-contact and intermittent contact atomic force microscopy (AFM), lateral force microscopy (LFM), force modulation microscopy (FMM), magnetic force microscopy (MFM), scanning tunneling microscopy (STM), electrostatic force microscopy (EFM) and scanning capacitance microscopy (SCM).

ATC 1500H Sputtering System (AJA International) equipped with a load-lock chamber and three sputtering guns (RF and one DC sputtering). Maximum sample size: 4". Surface analysis and film thickness measurement system will be added to the sputtering system in the future, which includes a PHI 3057 X-ray photoelectron spectrometer (Physical Electronics) and a M-44 spectroscopic ellipsometer.